A New AFM-Based Lithography Method: Thermochemical Nanolithography Chapter

Overview

CU Boulder Authors

• Marder, Seth

publication date

• January 1, 2010

has restriction

• closed

Date in CU Experts

• September 9, 2021 3:05 AM

Full Author List

• Wang D; Szoszkiewicz R; Kodali V; Curtis J; Marder S; Riedo E

Full Editor List

• Bhushan B

author count

• 6

citation count

• 2

published in

• NanoScience and Technology  Journal

Other Profiles

Digital Object Identifier (DOI)

• https://doi.org/10.1007/978-3-642-03535-7_22

International Standard Book Number (ISBN) 13

• 978-3-642-03534-0

Additional Document Info

start page

• 795

end page

• 811