ELECTROSTATIC COMB DRIVE ACTUATOR ARRAY WITH INTEGRATED CANTILEVER FOR SCANNING PROBE APPLICATIONS Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

June 20, 2021

has restriction

closed

Date in CU Experts

November 5, 2021 10:30 AM

Full Author List

Genter KL; Kabos P; Bright VM

author count

3

citation count

1

presented at event

21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Conference

Other Profiles

International Standard Serial Number (ISSN)

2167-0013

Electronic International Standard Serial Number (EISSN)

2167-0021

Digital Object Identifier (DOI)

https://doi.org/10.1109/transducers50396.2021.9495474

Additional Document Info

start page

619

end page

622