ELECTROSTATIC COMB DRIVE ACTUATOR ARRAY WITH INTEGRATED CANTILEVER FOR SCANNING PROBE APPLICATIONS Conference Proceeding uri icon

Overview

publication date

  • June 20, 2021

has restriction

  • closed

Date in CU Experts

  • November 5, 2021 10:30 AM

Full Author List

  • Genter KL; Kabos P; Bright VM

author count

  • 3

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 2167-0013

Electronic International Standard Serial Number (EISSN)

  • 2167-0021

Additional Document Info

start page

  • 619

end page

  • 622