Atomic layer deposition and etching methods for far ultraviolet aluminum mirrors Conference Proceeding

Overview

CU Boulder Authors

France, Kevin

publication date

August 8, 2017

has restriction

closed

Date in CU Experts

July 27, 2022 3:30 AM

Full Author List

Hennessy J; Moore CS; Balasubramanian K; Jewell AD; Carter C; France K; Nikzad S

Full Editor List

Hull TB; Kim DW; Hallibert P; Hughes GB; Pirich RG

author count

7

citation count

3

published in

Proceedings of SPIE Journal

presented at event

Conference on Astronomical Optics - Design, Manufacture, and Test of Space and Ground Systems Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2274633

Additional Document Info

volume

10401