Mechanistic studies of the acidolysis reactions occurring in silicon-containing bilayer photoresists Journal Article uri icon

Overview

publication date

  • February 1, 2002

Full Author List

  • Zharov I; Michl J; Sherwood MH; Sooriyakamaran R; Larson CE; DiPietro RA; Breyta G; Wallraff GM

Other Profiles

Additional Document Info

start page

  • 656

end page

  • 663

volume

  • 14

issue

  • 2