Mechanistic studies of the acidolysis reactions occurring in silicon-containing bilayer photoresists Journal Article uri icon

Overview

publication date

  • February 1, 2002

has restriction

  • closed

Date in CU Experts

  • September 9, 2013 9:45 AM

Full Author List

  • Zharov I; Michl J; Sherwood MH; Sooriyakamaran R; Larson CE; DiPietro RA; Breyta G; Wallraff GM

author count

  • 8

citation count

  • 3

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Additional Document Info

start page

  • 656

end page

  • 663

volume

  • 14

issue

  • 2