publication date
- March 1, 1998
ULSI technology and materials: Quantitative answers by combined mass spectrometry surface techniques
Conference Proceeding
Overview
Date in CU Experts
- September 13, 2023 12:57 PM
Full Author List
- Bersani M; Fedrizzi M; Sbetti M; Anderle M
Full Editor List
- Seiler DG; Diebold AC; Bullis WM; Shaffner TJ; McDonald R; Walters EJ
author count
- 4
citation count
- 9
published in
- AIP Conference Proceedings Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0094-243X
International Standard Book Number (ISBN) 10
- 1-56396-867-3
Additional Document Info
start page
- 892
end page
- 896
volume
- 449