Sub-40nm High-Volume Manufacturing Overlay Uncorrectable Error Evaluation Conference Proceeding

Overview

CU Boulder Authors

Keller, Wolfgang

publication date

February 25, 2013

has restriction

closed

Date in CU Experts

January 31, 2024 7:04 AM

Full Author List

Baluswamy P; Khurana R; Orf B; Keller W

Full Editor List

Starikov A; Cain JP

author count

4

citation count

0

published in

Proceedings of SPIE Journal

presented at event

27th Conference on Metrology, Inspection, and Process Control for Microlithography Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.2012672

Additional Document Info

volume

8681