Characterization of thin film MEMS using photo-acoustic microscopy Conference Proceeding

Overview

CU Boulder Authors

Murray, Todd W

publication date

June 20, 2001

has restriction

closed

Date in CU Experts

February 1, 2024 1:59 AM

Full Author List

Hernandez CM; Murray TW; Krishnaswamy S

Full Editor List

Gorecki C; Juptner WPO; Kujawinska M

author count

3

citation count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on Microsystems Engineering - Metrology and Inspection Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.445606

International Standard Book Number (ISBN) 10

0-8194-4095-7

Additional Document Info

start page

61

end page

69

volume

4400