Method of Quantified Mass Spectrometry for Atomic Layer Deposition Fluidized Bed Reactors
Journal Article
Overview
publication date
- December 5, 2025
Date in CU Experts
- December 16, 2025 10:53 AM
Full Author List
- Nguyen JA; Warren KJ; DuMont JW; Conklin DR; Paulson WM; Mejic D; Weimer AW
author count
- 7
published in
- Chemistry of Materials Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0897-4756
Electronic International Standard Serial Number (EISSN)
- 1520-5002
Digital Object Identifier (DOI)
Additional Document Info
number
- acs.chemmater.5c02268