Modeling the role of secondary electron emission in direct current magnetron sputtering using explicit energy-conserving particle-in-cell methods Journal Article uri icon

Overview

publication date

  • February 1, 2026

Date in CU Experts

  • February 19, 2026 3:34 AM

Full Author List

  • Main D; Jenkins TG; Theis JG; Werner GR; Cary JR; Lanham E; Veitzer SA; Kruger SE

author count

  • 8

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 1070-664X

Electronic International Standard Serial Number (EISSN)

  • 1089-7674

Additional Document Info

volume

  • 33

issue

  • 2

number

  • ARTN 023502