Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling Journal Article uri icon

Overview

publication date

  • May 1, 2026

Date in CU Experts

  • May 28, 2026 7:24 AM

Full Author List

  • Theis JG; Werner GR; Jenkins TG; Main D; Cary JR

author count

  • 5

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 1070-664X

Electronic International Standard Serial Number (EISSN)

  • 1089-7674

Additional Document Info

volume

  • 33

issue

  • 5

number

  • ARTN 053504