REACTIVE ION ETCHING OF NIOBIUM Journal Article

Overview

CU Boulder Authors

• Rogers, Charles

publication date

• January 1, 1981

has restriction

• closed

Date in CU Experts

• October 15, 2013 3:29 AM

Full Author List

• FOXE TT; HUNT BD; ROGERS C; KLEINSASSER AW; BUHRMAN RA

author count

• 5

citation count

• 19

published in

• Journal of Vacuum Science and Technology  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 0022-5355

Digital Object Identifier (DOI)

• https://doi.org/10.1116/1.571217

Additional Document Info

start page

• 1394

end page

• 1397

volume

• 19

issue

• 4