REACTIVE ION ETCHING OF NIOBIUM Journal Article uri icon

Overview

publication date

  • January 1, 1981

Full Author List

  • FOXE TT; HUNT BD; ROGERS C; KLEINSASSER AW; BUHRMAN RA

Other Profiles

Additional Document Info

start page

  • 1394

end page

  • 1397

volume

  • 19

issue

  • 4