Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers Journal Article uri icon

Overview

publication date

  • December 8, 2008

Date in CU Experts

  • December 11, 2013 11:27 AM

Full Author List

  • Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL

author count

  • 6

citation count

  • 27

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Additional Document Info

volume

  • 93

issue

  • 23

number

  • ARTN 233105