Scatterometry for in situ measurement of pattern reflow in nanoimprinted polymers Journal Article uri icon

Overview

publication date

  • December 8, 2008

Full Author List

  • Patrick HJ; Germer TA; Ding Y; Ro HW; Richter LJ; Soles CL

Other Profiles

Additional Document Info

start page

  • 233105

end page

  • 233105

volume

  • 93

issue

  • 23