Nanoimprint Lithography and the Role of Viscoelasticity in the Generation of Residual Stress in Model Polystyrene Patterns Journal Article uri icon


publication date

  • June 24, 2008

Full Author List

  • Ding Y; Ro HW; Alvine KJ; Okerberg BC; Zhou J; Douglas JF; Karim A; Soles CL

Other Profiles

Additional Document Info

start page

  • 1854

end page

  • 1862


  • 18


  • 12