Nanoimprint lithography and the role of viscoelasticity in the generation of residual stress in model polystyrene patterns Journal Article uri icon

Overview

publication date

  • June 24, 2008

Date in CU Experts

  • December 11, 2013 11:30 AM

Full Author List

  • Ding Y; Ro HW; Alvine KJ; Okerberg BC; Zhou J; Douglas JF; Karim A; Soles CL

author count

  • 8

citation count

  • 27

Other Profiles

International Standard Serial Number (ISSN)

  • 1616-301X

Electronic International Standard Serial Number (EISSN)

  • 1616-3028

Additional Document Info

start page

  • 1854

end page

  • 1862

volume

  • 18

issue

  • 12