Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography Journal Article uri icon

Overview

publication date

  • May 21, 2007

Full Author List

  • Ding Y; Ro HW; Douglas JF; Jones RL; Hine DR; Karim A; Soles CL

Other Profiles

Additional Document Info

start page

  • 1377

end page

  • 1382

volume

  • 19

issue

  • 10