Evidence for internal stresses induced by nanoimprint lithography Journal Article uri icon

Overview

publication date

  • January 1, 2006

Full Author List

  • Ro HW; Ding Y; Lee H-J; Hines DR; Jones RL; Lin EK; Karim A; Wu W-L; Soles CL

Other Profiles

Additional Document Info

start page

  • 2973

end page

  • 2973

volume

  • 24

issue

  • 6