Evidence for internal stresses induced by nanoimprint lithography Journal Article uri icon

Overview

publication date

  • November 1, 2006

Date in CU Experts

  • December 11, 2013 11:32 AM

Full Author List

  • Ro HW; Ding Y; Lee H-J; Hines DR; Jones RL; Lin EK; Karim A; Wu W-L; Soles CL

author count

  • 9

citation count

  • 19

Other Profiles

International Standard Serial Number (ISSN)

  • 2166-2746

Additional Document Info

start page

  • 2973

end page

  • 2978

volume

  • 24

issue

  • 6