NSF 2000 Workshop on Manufacturing of Micro-Electro-Mechanical Systems Journal Article uri icon

Overview

publication date

  • April 1, 2000

has restriction

  • closed

Date in CU Experts

  • December 17, 2013 1:02 AM

Full Author List

  • TSENG AA; TANG WC; LEE Y-C; ALLEN J

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 1062-0656

Additional Document Info

start page

  • 292

end page

  • 360

volume

  • 8

issue

  • 4