Micromechanical properties of silicon-carbide thin films deposited using single-source chemical-vapor deposition Journal Article uri icon

Overview

publication date

  • July 16, 2001

Full Author List

  • Stoldt CR; Fritz MC; Carraro C; Maboudian R

Other Profiles

Additional Document Info

start page

  • 347

end page

  • 349

volume

  • 79

issue

  • 3