Micromechanical properties of silicon-carbide thin films deposited using single-source chemical-vapor deposition Journal Article uri icon

Overview

publication date

  • July 16, 2001

Date in CU Experts

  • January 15, 2014 10:44 AM

Full Author List

  • Stoldt CR; Fritz MC; Carraro C; Maboudian R

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 0003-6951

Electronic International Standard Serial Number (EISSN)

  • 1077-3118

Additional Document Info

start page

  • 347

end page

  • 349

volume

  • 79

issue

  • 3