Importance of argon pressure in the preparation of rf‐sputtered amorphous silicon–hydrogen alloys
Journal Article
Overview
publication date
- May 1, 1979
Full Author List
- Anderson DA; Moddel G; Paesler MA; Paul W
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 906
end page
- 912
volume
- 16
issue
- 3