Importance of argon pressure in the preparation of rf‐sputtered amorphous silicon–hydrogen alloys Journal Article uri icon

Overview

publication date

  • May 1, 1979

Full Author List

  • Anderson DA; Moddel G; Paesler MA; Paul W

Other Profiles

Additional Document Info

start page

  • 906

end page

  • 912

volume

  • 16

issue

  • 3