NANOMETER SIDEWALL LITHOGRAPHY BY RESIST SILYLATION Journal Article

Overview

CU Boulder Authors

• Van Zeghbroeck, Bart

publication date

• November 1, 1989

has restriction

• closed

Date in CU Experts

• April 17, 2014 3:20 AM

Full Author List

• VETTIGER P; BUCHMANN P; DATWYLER K; SASSO G; VANZEGHBROECK BJ

author count

• 5

citation count

• 11

published in

• Journal of Vacuum Science and Technology Part B: Nanotechnology and Microelectronics  Journal

Other Profiles

International Standard Serial Number (ISSN)

• 1071-1023

Digital Object Identifier (DOI)

• https://doi.org/10.1116/1.584452

Additional Document Info

start page

• 1756

end page

• 1759

volume

• 7

issue

• 6