Nanometer sidewall lithography by resist silylation Journal Article uri icon

Overview

publication date

  • November 1, 1989

has restriction

  • closed

Date in CU Experts

  • April 17, 2014 3:20 AM

Full Author List

  • Vettiger P

author count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-211X

Additional Document Info

start page

  • 1756

end page

  • 1756

volume

  • 7

issue

  • 6