High uniformity collimator for x-ray proximity lithography
Conference Proceeding
Overview
publication date
- July 21, 1999
has restriction
- closed
Date in CU Experts
- May 28, 2014 3:38 AM
Full Author List
- Cash W
Full Editor List
- MacDonald CA; Goldberg KA; Maldonado JR; ChenMayer HH; Vernon SP
author count
- 1
published in
- Proceedings of SPIE Journal
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 0277-786X
Digital Object Identifier (DOI)
International Standard Book Number (ISBN) 10
- 0-8194-3253-9
Additional Document Info
start page
- 59
end page
- 66
volume
- 3767