High uniformity collimator for x-ray proximity lithography Conference Proceeding

Overview

CU Boulder Authors

CASH, WEBSTER

publication date

July 31, 2000

has restriction

closed

Date in CU Experts

May 28, 2014 3:38 AM

Full Author List

Cash W

Full Editor List

MacDonald CA; Khounsary AM

author count

1

citation count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on Advances in Laboratory-Based X-Ray Sources and Optics Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.405897

International Standard Book Number (ISBN) 10

0-8194-3789-1

Additional Document Info

start page

228

end page

237

volume

4144