Atomic Layer Deposition/Molecular Layer Deposition for Packaging and Interconnect of N/MEMS Conference Proceeding

Overview

CU Boulder Authors

Lee, Y. C.

publication date

January 24, 2011

Full Author List

Lee YC

published in

Proceedings of SPIE Journal

Other Profiles

Digital Object Identifier (DOI)

10.1117/12.877110

Additional Document Info

volume

7928