Tolerance and precision study for solder self-assembled MEMS
Conference Proceeding
Overview
publication date
- May 22, 2000
Full Author List
- Harsh KF; Kladitis PE; Zhang YH; Dunn ML; Bright VM; Lee YC
published in
- Proceedings of SPIE Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 173
end page
- 191
volume
- 4075