Bulk-etched surface micromachined and flip-chip integrated micromirror array for infrared applications Conference Proceeding uri icon

Overview

publication date

  • August 21, 2000

Full Author List

  • Tuantranont A; Liew LA; Bright VM; Zhang JL; Zhang WG; Lee YC

Other Profiles

Additional Document Info

start page

  • 71

end page

  • 72