Bulk-etched surface micromachined and flip-chip integrated micromirror array for infrared applications
Conference Proceeding
Overview
publication date
- August 21, 2000
Full Author List
- Tuantranont A; Liew LA; Bright VM; Zhang JL; Zhang WG; Lee YC
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 71
end page
- 72