Deformation and stability of gold/polysilicon layered MEMS plate structures subjected to thermal loading Conference Proceeding uri icon

Overview

publication date

  • November 15, 2000

has restriction

  • closed

Date in CU Experts

  • May 28, 2014 4:10 AM

Full Author List

  • Dunn ML; Zhang YH; Bright VM

Full Editor List

  • Muhlstein CL; Brown SB

author count

  • 3

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 1040-1695

International Standard Book Number (ISBN) 10

  • 0-8031-2889-4

Additional Document Info

start page

  • 306

end page

  • 317

volume

  • 1413