Fabrication and characterization of 4H-SiC MOS capacitors with atomic layer deposited (ALD) SiO2. Conference Proceeding uri icon

Overview

publication date

  • August 7, 2000

Date in CU Experts

  • May 28, 2014 4:13 AM

Full Author List

  • Perez I; Elam J; George S; Groner M; Torvik JT; Van Zeghbroeck B

author count

  • 6

citation count

  • 1

Other Profiles

International Standard Book Number (ISBN) 10

  • 0-7803-6382-5

Additional Document Info

start page

  • 144

end page

  • 147