Fabrication and characterization of 4H-SiC MOS capacitors with atomic layer deposited (ALD) SiO2. Conference Proceeding uri icon

Overview

publication date

  • August 7, 2000

Full Author List

  • Perez I; Elam J; George S; Groner M; Torvik JT; Van Zeghbroeck B

Other Profiles

Additional Document Info

start page

  • 144

end page

  • 147