Coupled substrate-resonator-electrostatic simulation and validation of high-Q MEMS resonator performance Conference Proceeding uri icon

Overview

publication date

  • February 23, 2003

Date in CU Experts

  • May 28, 2014 4:21 AM

Full Author List

  • Park YH; Park KC

Full Editor List

  • Laudon M; Romanowicz B

author count

  • 2

Other Profiles

International Standard Book Number (ISBN) 10

  • 0-9728422-0-9

Additional Document Info

start page

  • 412

end page

  • 415