Coupled substrate-resonator-electrostatic simulation and validation of high-Q MEMS resonator performance
Conference Proceeding
Overview
publication date
- February 23, 2003
Date in CU Experts
- May 28, 2014 4:21 AM
Full Author List
- Park YH; Park KC
Full Editor List
- Laudon M; Romanowicz B
author count
- 2
presented at event
Other Profiles
International Standard Book Number (ISBN) 10
- 0-9728422-0-9
Additional Document Info
start page
- 412
end page
- 415