Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism Conference Proceeding

Overview

CU Boulder Authors

Bright, Victor Mark

publication date

October 22, 2001

has restriction

closed

Date in CU Experts

May 28, 2014 4:57 AM

Full Author List

Michalicek MA; Bright VM

Full Editor List

Motamedi ME; Goring R

author count

2

published in

Proceedings of SPIE Journal

presented at event

Conference on MOEMS and Miniaturized Systems II Conference

Other Profiles

International Standard Serial Number (ISSN)

0277-786X

Electronic International Standard Serial Number (EISSN)

1996-756X

Digital Object Identifier (DOI)

https://doi.org/10.1117/12.443088

International Standard Book Number (ISBN) 10

0-8194-4289-5

Additional Document Info

start page

209

end page

220

volume

4561