Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism
Conference Proceeding
Overview
publication date
- October 22, 2001
Full Author List
- Michalicek MA; Bright VM
published in
- Proceedings of SPIE Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 209
end page
- 220
volume
- 4561