Atomic layer deposition for fabricating capacitive micromachined ultrasonic transducers: Initial characterization Conference Proceeding uri icon

Overview

publication date

  • April 15, 2004

Full Author List

  • Liu LL; Mukdadi OM; Hertzberg JR; Kim HB; Bright VM; Shandas R

Additional Document Info

start page

  • 512

end page

  • 515