Atomic layer deposition for fabricating capacitive micromachined ultrasonic transducers: Initial characterization
Conference Proceeding
Overview
publication date
- April 15, 2004
Date in CU Experts
- May 28, 2014 4:57 AM
Full Author List
- Liu LL; Mukdadi OM; Hertzberg JR; Kim HB; Bright VM; Shandas R
author count
- 6
citation count
- 2
presented at event
Other Profiles
International Standard Book Number (ISBN) 10
- 0-7803-8388-5
Additional Document Info
start page
- 512
end page
- 515