IEEE Journal of Microelectromechanical Systems Journal

Research

keywords

• 0906 Electrical and Electronic Engineering, 0913 Mechanical Engineering, 0910 Manufacturing Engineering

Other

publication venue for

• Mechanical Interfacing Using Suspended Ultrathin Films From ALD 2016
• A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and Test 2014
• Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter 2013
• Interchangeable Stage and Probe Mechanisms for Microscale Universal Mechanical Tester 2012
• The Development of Polymer-Based Flat Heat Pipes 2011
• A Computational Design Methodology for Assembly and Actuation of Thin-Film Structures via Patterning of Eigenstrains 2009
• Mechanical effects of galvanic corrosion on structural polysilicon 2007
• RF-MEMS capacitive switches fabricated using printed circuit processing techniques 2006
• Nonlinear finite element analysis of a thin piezoelectric laminate for micro power generation 2003
• Surface tension-powered self-assembly of micro structures - The state-of-the-art 2003
• Deformation and structural stability of layered plate microstructures subjected to thermal loading 2002