keywords
- 0906 Electrical and Electronic Engineering, 0913 Mechanical Engineering, 0910 Manufacturing Engineering
IEEE Journal of Microelectromechanical Systems
Journal
Research
Other
publication venue for
- Development of Ultra-Thin Thermal Ground Planes by Using Stainless-Steel Mesh as Wicking Structure 2016
- Mechanical Interfacing Using Suspended Ultrathin Films From ALD 2016
- Thin Flexible Thermal Ground Planes: Fabrication and Scaling Characterization 2015
- A Monolithic Polyimide Micro Cryogenic Cooler: Design, Fabrication, and Test 2014
- Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter 2013
- The Development of Polymer-Based Planar Microcryogenic Coolers 2013
- Interchangeable Stage and Probe Mechanisms for Microscale Universal Mechanical Tester 2012
- The Development of Polymer-Based Flat Heat Pipes 2011
- A Computational Design Methodology for Assembly and Actuation of Thin-Film Structures via Patterning of Eigenstrains 2009
- Asymmetric dielectric trilayer cantilever probe for calorimetric high-frequency field imaging 2007
- Mechanical effects of galvanic corrosion on structural polysilicon 2007
- RF-MEMS capacitive switches fabricated using printed circuit processing techniques 2006
- Nonlinear finite element analysis of a thin piezoelectric laminate for micro power generation 2003
- Surface tension-powered self-assembly of micro structures - The state-of-the-art 2003
- Deformation and structural stability of layered plate microstructures subjected to thermal loading 2002