Journal of Micro/Nanolithography, MEMS, and MOEMS Journal

Overview

publication venue for

• Super-resolved critical dimensions in far-field I-line photolithography 2019
• Tunable external cavity diode laser using a micromachined silicon flexure and a volume holographic reflection grating for applications in atomic optics 2008

Research

keywords

• 0205 Optical Physics, 0906 Electrical and Electronic Engineering