Super-resolved critical dimensions in far-field I-line photolithography Journal Article uri icon

Overview

publication date

  • January 1, 2019

has restriction

  • closed

Date in CU Experts

  • January 26, 2020 9:34 AM

Full Author List

  • Miller DB; Forman DL; Jones AM; McLeod RR

author count

  • 4

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-5150

Electronic International Standard Serial Number (EISSN)

  • 1932-5134

Additional Document Info

volume

  • 18

issue

  • 1

number

  • ARTN 013505