Atomic Layer Etching of Al2O3 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)(2) and Hydrogen Fluoride Journal Article uri icon

Overview

publication date

  • February 1, 2015

Full Author List

  • Lee Y; George SM

Other Profiles

Additional Document Info

start page

  • 2061

end page

  • 2070

volume

  • 9

issue

  • 2