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George, Steven Professor

Positions

Research Areas research areas

Research

research overview

  • Dr. George‚Äôs research interests are in the areas of surface chemistry, thin film growth and etching, and nanostructure engineering. He is currently directing a research effort focusing on atomic layer deposition (ALD), molecular layer deposition (MLD) and atomic layer etching (ALE). This research is examining new surface chemistry, measuring thin film growth rates, measuring thin film etching rates, characterizing the properties of films and developing new reactors for ALD, MLD & ALE. Special areas of expertise are developing new surface chemistries for hybrid organic-inorganic hybrid polymers and in situ methods for monitoring the growth & etching of ALD & MLD films. There are many applications of ALD, MLD & ALE to modern technology. Application areas include: semiconductor processing, MEMS/NEMS, Li ion batteries, fuel cells, supercapacitors, gas sensors, nano-photovoltaic devices, gas diffusion barriers and flexible & protective coatings.

keywords

  • Surface Chemistry, Thin Film Growth & Etching, Nanostructure Engineering, Atomic Layer Deposition, Molecular Layer Deposition, Characterization and Properties of Thin Films, Materials Chemistry, Atomic Layer Etching

Publications

selected publications

Teaching

courses taught

  • CHEM 2101 Laboratory for Chemical Energetics and Dynamics (Spring 2019)
  • CHEM 4901 Independent Study in Chemistry and Biochemistry (Spring 2019)
  • CHEM 5281 Semiconductor Processing and Device Fabrication (Spring 2019)
  • CHEM 6901 Research in Chemistry (Spring 2019)
  • CHEM 8991 Doctoral Dissertation (Spring 2019)
  • MCEN 8999 Doctoral Thesis (Spring 2019)
  • CHEM 4901 Independent Study in Chemistry and Biochemistry (Fall 2018)
  • CHEM 6901 Research in Chemistry (Fall 2018)
  • CHEM 8991 Doctoral Dissertation (Fall 2018)
  • MCEN 8999 Doctoral Thesis (Fall 2018)
  • CHEM 4901 Independent Study in Chemistry and Biochemistry (Summer 2018)
  • CHEM 6901 Research in Chemistry (Summer 2018)
  • CHEM 8991 Doctoral Dissertation (Summer 2018)
  • CHEM 4901 Independent Study in Chemistry and Biochemistry (Spring 2018)
  • CHEM 5571 Surface Science (Spring 2018)
  • CHEM 6901 Research in Chemistry (Spring 2018)
  • CHEM 8991 Doctoral Dissertation (Spring 2018)
  • MCEN 8999 Doctoral Thesis (Spring 2018)

Background

awards and honors

International Activities

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