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Publications in VIVO

George, Steven



Research Areas research areas


research overview

  • Dr. George’s research interests are in the areas of surface chemistry, thin film growth and etching, and nanostructure engineering. He is currently directing a research effort focusing on atomic layer etching (ALE), atomic layer deposition (ALD) and molecular layer deposition (MLD). This research is examining new surface chemistry, measuring thin film growth rates, measuring thin film etching rates, characterizing the properties of films, and developing new reactors for ALE, ALD and MLD. Special areas of interest are determining new surface chemistries for thermal ALE, examining the enhancement of ALD and ALE using low energy electrons, and developing in situ methods for monitoring the growth & etching of thin films. There are many applications of ALE, ALD & MLD to modern technology. Application areas include: semiconductor processing, MEMS/NEMS, Li ion batteries, fuel cells, supercapacitors, gas sensors, nano-photovoltaic devices, gas diffusion barriers and flexible & protective coatings.


  • Surface Chemistry, Thin Film Growth & Etching, Nanostructure Engineering, Atomic Layer Deposition, Molecular Layer Deposition, Characterization and Properties of Thin Films, Materials Chemistry, Atomic Layer Etching


selected publications


courses taught

  • CHEM 2101 - Laboratory for Chemical Energetics and Dynamics
    Primary Instructor - Spring 2019
    Coordinates with the lectures topics in CHEM 2100. Emphasizes the acquisition of more advanced laboratory skills, experimental design, data interpretation and analysis. Department enforced corequisite: CHEM 2100. Degree credit not granted for this course and CHEM 1134.
  • CHEM 5251 - Materials Chemistry and Properties
    Primary Instructor - Fall 2019 / Fall 2020 / Fall 2021 / Fall 2022 / Fall 2023
    Lec. Understanding of materials from chemistry perspective including metals, oxides, semiconductors and polymers. Basic description of chemical preparation of materials. Overview of fundamental properties of materials including structural, chemical, mechanical, thermal, electrical, and optical properties. Description of behavior of materials and various applications in modern technology. Discussion of materials characterization methods. Same as CHEM 4251.
  • CHEM 5281 - Semiconductor Processing and Device Fabrication
    Primary Instructor - Spring 2019 / Spring 2021
    Understanding of semiconductor processing and device fabrication from chemistry perspective. Overview of processing steps used to fabricate inorganic semiconductor devices including deposition, patterning and etching techniques. Description of process integration during device fabrication. Discussion of key issues facing advanced semiconductor fabrication.
  • CHEM 5571 - Surface Science
    Primary Instructor - Spring 2018 / Spring 2020 / Spring 2022
    Lect. Principles of surface science with emphasis on fundamental surface phenomena, surface techniques and surface chemistry. Basic description of surfaces, adsorbate-surface interactions, surface kinetics and methods of surface analysis. Surface science of heterogeneous catalysis, semiconductor processing, and environmental interfaces. Department enforced prerequisites: undergraduate physical chemistry and graduate standing or instructor consent.
  • CHEM 6901 - Research in Chemistry
    Primary Instructor - Spring 2018 / Fall 2018 / Spring 2019 / Spring 2020 / Fall 2020 / Spring 2021 / Fall 2022 / Spring 2023 / Fall 2023 / Spring 2024
    May be repeated up to 15 total credit hours.
  • CHEM 7531 - Seminar: Surface Chemistry and Thin Film Growth
    Primary Instructor - Spring 2023 / Fall 2023 / Spring 2024
    Topics in surface chemistry and thin film growth with focus on atomic layer deposition (ALD) and molecular layer deposition (MLD). Properties of thin films grown using ALD and MLD. Applications of thin films in areas including flexible displays, energy storage and catalysis. May be repeated up to 6 total credit hours. Department consent required.
  • MSEN 5470 - Materials Composition and Structure
    Primary Instructor - Fall 2022
    The synthesis, organization, and processing of materials can enable functional performance. Curriculum will overview the synthesis and design of functional organic and inorganic materials. A particular emphasis will be placed on structure-performance correlations between chemistry and materials organization. Topical foci will include polymers, biomaterials, and materials for energy.


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