Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties Journal Article uri icon

Overview

publication date

  • June 1, 2013

Full Author List

  • Lee BH; Anderson VR; George SM

Other Profiles

Additional Document Info

start page

  • 204

end page

  • 212

volume

  • 19

issue

  • 4-6