Molecular Layer Deposition of Zircone and ZrO2/Zircone Alloy Films: Growth and Properties Journal Article
Overview
publication date
- June 1, 2013
has restriction
- closed
Date in CU Experts
- September 3, 2013 12:09 PM
Full Author List
- Lee BH; Anderson VR; George SM
author count
- 3
citation count
- 56
published in
- Chemical Vapor Deposition Journal
Other Profiles
International Standard Serial Number (ISSN)
- 0948-1907
Electronic International Standard Serial Number (EISSN)
- 1521-3862
Digital Object Identifier (DOI)
Additional Document Info
start page
- 204
end page
- 212
volume
- 19
issue
- 4-6