A common-path heterodyne interferometer for surface profiling in microelectronic fabrication
Journal Article
Overview
publication date
- May 1, 2001
Full Author List
- Klein EJ; Ramirez WF; Hall JL
published in
- Review of Scientific Instruments Journal
Other Profiles
Digital Object Identifier (DOI)
Open Access Copy
Additional Document Info
start page
- 2455
end page
- 2466
volume
- 72
issue
- 5