A common-path heterodyne interferometer for surface profiling in microelectronic fabrication Journal Article uri icon

Overview

publication date

  • May 1, 2001

Date in CU Experts

  • March 13, 2015 11:55 AM

Full Author List

  • Klein EJ; Ramirez WF; Hall JL

author count

  • 3

citation count

  • 6

Other Profiles

International Standard Serial Number (ISSN)

  • 0034-6748

Additional Document Info

start page

  • 2455

end page

  • 2466

volume

  • 72

issue

  • 5