A common-path heterodyne interferometer for surface profiling in microelectronic fabrication Journal Article

Overview

CU Boulder Authors

Hall, John L

publication date

May 1, 2001

Full Author List

Klein EJ; Ramirez WF; Hall JL

published in

Review of Scientific Instruments Journal

Other Profiles

Digital Object Identifier (DOI)

10.1063/1.1367353

Additional Document Info

start page

2455

end page

2466

volume

72

issue

5