Molybdenum Atomic Layer Deposition Using MoF6 and Si2H6 as the Reactants Journal Article uri icon

Overview

publication date

  • April 12, 2011

Full Author List

  • Seghete D; Rayner GB; Cavanagh AS; Anderson VR; George SM

Other Profiles

Additional Document Info

start page

  • 1668

end page

  • 1678

volume

  • 23

issue

  • 7