Molybdenum Atomic Layer Deposition Using MoF6 and Si2H6 as the Reactants Journal Article uri icon

Overview

publication date

  • April 12, 2011

has restriction

  • closed

Date in CU Experts

  • September 3, 2013 12:13 PM

Full Author List

  • Seghete D; Rayner GB; Cavanagh AS; Anderson VR; George SM

author count

  • 5

citation count

  • 43

Other Profiles

International Standard Serial Number (ISSN)

  • 0897-4756

Additional Document Info

start page

  • 1668

end page

  • 1678

volume

  • 23

issue

  • 7