Thermomechanical behavior and reliability of Au/Si MEMS structures Conference Proceeding uri icon

Overview

publication date

  • April 25, 2004

has restriction

  • closed

Date in CU Experts

  • March 13, 2015 2:29 AM

Full Author List

  • Miller D; Herrmann C; Spark K; Finch D; George S; Stoldt C; Gall K

author count

  • 7

citation count

  • 1

Other Profiles

International Standard Book Number (ISBN) 10

  • 0-7803-8315-X

Additional Document Info

start page

  • 633

end page

  • 634