Principles of voxel refinement in optical direct write lithography Journal Article uri icon

Overview

publication date

  • January 1, 2011

Full Author List

  • Scott TF; Kloxin CJ; Forman DL; McLeod RR; Bowman CN

Other Profiles

Additional Document Info

start page

  • 14150

end page

  • 14155

volume

  • 21

issue

  • 37