Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniques Journal Article uri icon

Overview

publication date

  • March 1, 2005

Full Author List

  • Harant AW; Whipple SG; Douglas K; Bowman CN

Other Profiles

Additional Document Info

start page

  • 354

end page

  • 358

volume

  • 23

issue

  • 2