Atomic Layer Etching of HfO2 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)(2) and HF Journal Article uri icon

Overview

publication date

  • January 1, 2015

Full Author List

  • Lee Y; DuMont JW; George SM

Other Profiles

Additional Document Info

start page

  • N5013

end page

  • N5022

volume

  • 4

issue

  • 6