Atomic Layer Etching of HfO2 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)2 and HF Journal Article uri icon

Overview

publication date

  • January 1, 2015

has restriction

  • hybrid

Date in CU Experts

  • June 17, 2015 9:40 AM

Full Author List

  • Lee Y; DuMont JW; George SM

author count

  • 3

citation count

  • 95

Other Profiles

International Standard Serial Number (ISSN)

  • 2162-8769

Additional Document Info

start page

  • N5013

end page

  • N5022

volume

  • 4

issue

  • 6