Mechanism of Thermal Al2O3 Atomic Layer Etching Using Sequential Reactions with Sn(acac)(2) and HF Journal Article uri icon

Overview

publication date

  • May 26, 2015

Full Author List

  • Lee Y; DuMont JW; George SM

Other Profiles

Additional Document Info

start page

  • 3648

end page

  • 3657

volume

  • 27

issue

  • 10