Atomic Layer Deposition of AlF3 Using Trimethylaluminum and Hydrogen Fluoride Journal Article uri icon

Overview

publication date

  • June 25, 2015

Full Author List

  • Lee Y; DuMont JW; Cavanagh AS; George SM

Other Profiles

Additional Document Info

start page

  • 14185

end page

  • 14194

volume

  • 119

issue

  • 25