Atomic Layer Deposition of AlF3 Using Trimethylaluminum and Hydrogen Fluoride Journal Article uri icon

Overview

publication date

  • June 25, 2015

Date in CU Experts

  • July 29, 2015 11:50 AM

Full Author List

  • Lee Y; DuMont JW; Cavanagh AS; George SM

author count

  • 4

citation count

  • 58

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Additional Document Info

start page

  • 14185

end page

  • 14194

volume

  • 119

issue

  • 25