Atomic Layer Deposition of Ultrathin and Continuous Metal Films Conference Proceeding

Overview

CU Boulder Authors

George, Steven

publication date

May 20, 2014

Date in CU Experts

July 29, 2015 11:50 AM

Full Author List

George SM

author count

1

presented at event

IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) Conference

Other Profiles

International Standard Serial Number (ISSN)

2380-632X

Electronic International Standard Serial Number (EISSN)

2380-6338

Additional Document Info

start page

325

end page

326