Pyrolysis of Alucone Molecular Layer Deposition Films Studied Using In Situ Transmission Fourier Transform Infrared Spectroscopy Journal Article uri icon

Overview

publication date

  • July 2, 2015

Full Author List

  • DuMont JW; George SM

Other Profiles

Additional Document Info

start page

  • 14603

end page

  • 14612

volume

  • 119

issue

  • 26