Numerical simulation of the evolution of nanometer-scale surface topography generated by ion milling Journal Article uri icon

Overview

publication date

  • May 1, 1998

Full Author List

  • Winningham TA; Zou Z; Douglas K; Clark NA

Other Profiles

Additional Document Info

start page

  • 1178

end page

  • 1182

volume

  • 16

issue

  • 3