DEPOSITION OF TITANIUM-OXIDE FILMS FROM METAL-ORGANIC PRECURSOR BY ELECTRON-CYCLOTRON-RESONANCE PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION Conference Proceeding uri icon

Overview

publication date

  • January 1, 1994

Full Author List

  • NAGAHORI A; RAJ R

Additional Document Info

start page

  • 117

end page

  • 122

volume

  • 335