OXIDATION-KINETICS OF SILICON SURFACES IN THE SUBMONOLAYER REGIME
Journal Article
Overview
publication date
- September 25, 1988
Date in CU Experts
- December 9, 2015 12:04 PM
Full Author List
- GUPTA P; MAK CH; COON PA; GEORGE SM
author count
- 4
published in
Other Profiles
International Standard Serial Number (ISSN)
- 0065-7727
Additional Document Info
start page
- 162
end page
- COLL
volume
- 196