Atomic Layer Etching of AlF3 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)2 and Hydrogen Fluoride Journal Article uri icon

Overview

publication date

  • November 12, 2015

has restriction

  • closed

Date in CU Experts

  • December 11, 2015 10:39 AM

Full Author List

  • Lee Y; DuMont JW; George SM

author count

  • 3

citation count

  • 32

Other Profiles

International Standard Serial Number (ISSN)

  • 1932-7447

Electronic International Standard Serial Number (EISSN)

  • 1932-7455

Additional Document Info

start page

  • 25385

end page

  • 25393

volume

  • 119

issue

  • 45