Atomic Layer Etching of AlF3 Using Sequential, Self-Limiting Thermal Reactions with Sn(acac)(2) and Hydrogen Fluoride Journal Article uri icon

Overview

publication date

  • November 12, 2015

Full Author List

  • Lee Y; DuMont JW; George SM

Other Profiles

Additional Document Info

start page

  • 25385

end page

  • 25393

volume

  • 119

issue

  • 45