Fluorescent tags to visualize defects in Al2O3 thin films grown using atomic layer deposition Journal Article uri icon

Overview

publication date

  • October 30, 2009

Full Author List

  • Zhang Y; Zhang Y-Z; Miller DC; Bertrand JA; Jen S-H; Yang R; Dunn ML; George SM; Lee YC

Other Profiles

Additional Document Info

start page

  • 6794

end page

  • 6797

volume

  • 517

issue

  • 24